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Mask defect management in extreme-ultraviolet lithography

Nai-Ching Chen、Chia-Hao Yu、Ching‐Fang Yu 等 8 位作者2014-06-16Journal of Micro/Nanolithography MEMS and MOEMS

We present a series of baseline techniques for inspection, cleaning, repair, and native defect mitigation of extreme ultraviolet (EUV) masks. Deep-ultraviolet inspectors are capable of inspecting patterns down to about 45 nm in pitch on wafer. Cleaning methods involving both chemical and physical forces have achieved…

Advancements in Photolithography TechniquesElectron and X-Ray Spectroscopy TechniquesIntegrated Circuits and Semiconductor Failure Analysis

Effects of Trace SO2 and Na2SO4 Deposit on the Reaction Behavior of Al2O3-scale Forming Alloys

Xu Liu2014-06-16D-Scholarship@Pitt (University of Pittsburgh)

This study focused on the effects of minor alloying elements (Si, Pt), trace SO2, and Na2SO4 deposit on oxidation and 900°C sulfate-deposit-induced hot corrosion behavior of Al2O3-scale forming alloys. In the first part of this study, the effects of Si, Pt and Si+Pt on the oxidation and hot corrosion behavior of γ΄-Ni…

Advanced ceramic materials synthesisCatalytic Processes in Materials ScienceHigh-Temperature Coating Behaviors

Online partial discharge signal conditioning for φ – q – n representation under noisy condition in cable systems

Tohid Shahsavarian、S. Mohammad Shahrtash2014-06-16IET Science Measurement & Technology

Almost all on‐site measured partial discharge (PD) signals in cable networks suffer from the contributions of reflected PD pulses and noise which both decrease precision of measurement. This study explores an online digital signal conditioning procedure for PD signals being measured under noisy conditions in cable net…

High voltage insulation and dielectric phenomenaLightning and Electromagnetic PhenomenaPower Transformer Diagnostics and Insulation

Topological defects of optical indicatrix orientation in stressed glasses: spatial distribution of optical anisotropy parameters

Yu Vasylkiv、I Skab、Mykola Smyk 等 4 位作者2014-06-16Applied Optics

We have revealed topological defects (TDs) of the angle of optical indicatrix (OI) orientation in a glass Li2B4O7 sample, which originate from the specific spatial distribution of optical birefringence caused by residual mechanical stresses. It has been found that the strength of TDs of the OI rotation angle is equal…

Glass properties and applicationsOptical Polarization and EllipsometrySurface Roughness and Optical Measurements

Desirable Imperfection in Product Materials

Owain Pedgley2014-06-16Proceedings of DRS

Manufactured products are customarily made with materials having ‘perfect’ surface qualities, such as uniformity, flatness, glossiness, repetition etc. They are generally devoid of defects. Although the aesthetic of ‘material perfection’ prevails, this is not to say that alternative aesthetics based on ‘material imper…

Manufacturing Process and OptimizationMaterial Selection and Properties

Detailed Study of Magnetic Behaviour in Single Crystalline Eu3Rh4Sn13

Arvind Maurya、P. Bonville、A. Thamizhavel 等 4 位作者2014-06-16Proceedings of the International Conference on Strongly Correlated Electron Systems (SCES2013)

Proceedings of the International Conference on Strongly Correlated Electron Systems (SCES2013)

Magnetic and transport properties of perovskites and related materialsRare-earth and actinide compoundsThermodynamic and Structural Properties of Metals and Alloys

84 MeV C-ions irradiation effects on Zr–45Ti–5Al–3V alloy

Weipeng Wang、Zhengcao Li、Zhengjun Zhang 等 4 位作者2014-06-16Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Newly developed Zr–45Ti–5Al–3V alloy were irradiated by 84 MeV carbon ions with doses of 4 * 1015 ions/cm2 and 12 * 1015 ions/cm2, respectively. XRD, SEM, TEM, SAD and tensile tests were performed to study the microstructural evolution and mechanical properties modification upon high energy carbon ion irradiation. XRD…

Nuclear Materials and PropertiesAdvanced materials and compositesNuclear materials and radiation effects

Analyzing electromigration near a right-angled corner composed of dissimilar metals by investigating the effect of material combination on atomic flux divergence

Xu Zhao、Yasuhiro Kimura、Masumi SAKA2014-06-16Japanese Journal of Applied Physics

Atomic flux divergence (AFD) near a right-angled corner composed of dissimilar metals is theoretically analyzed in the present paper. A basic model of layered interconnect lines involving a right-angled corner is constructed. A two-dimensional electromigration (EM) problem near the corner is analyzed by treating the a…

Electronic Packaging and Soldering TechnologiesSemiconductor materials and devicesCopper Interconnects and Reliability

Domain wall displacement by remote spin-current injection

P. N. Skirdkov、K. A. Zvezdin、A. D. Belanovsky 等 7 位作者2014-06-16Applied Physics Letters

We demonstrate numerically the ability to displace a magnetic domain wall (DW) by remote spin current injection. We consider a long and narrow magnetic nanostripe with a single DW. The spin-polarized current is injected perpendicularly to the film plane through a small nanocontact which is located at certain distance…

Magnetic properties of thin filmsQuantum and electron transport phenomenaChemical and Physical Properties of Materials

Single Crystal Growth and Anisotropic Magnetic Properties of Peanut-Shaped Cage Compound Tm6Cr4Al43

Kengo Fushiya、Ryoichi Miyazaki、Ryuji Higashinaka 等 5 位作者2014-06-16Proceedings of the International Conference on Strongly Correlated Electron Systems (SCES2013)

We have succeeded in growing single crystals of Tm6Cr4Al43 by the Al self-flux method. A single crystal structure analysis has confirmed that the grown single crystals have the hexagonal close-packed Ho6Mo4Al43-type crystal structure (P63/mcm, #193), which consists of stacking peanut-shaped cages with two Tm ions insi…

Rare-earth and actinide compoundsIron-based superconductors researchInorganic Chemistry and Materials

Broadband acoustic manipulation by mimicking an arbitrary potential well

Zhe Zhang、Bin Liang、Ruiqi Li 等 6 位作者2014-06-16Applied Physics Letters

We have proposed a continuous-index system to mimic an arbitrary “potential well” for realizing versatile manipulations on acoustic waves within a broadband. An analytical description of the acoustic propagation in the system is developed, and its validity is verified by using full-wave simulation. Both the theoretica…

Metamaterials and Metasurfaces ApplicationsAcoustic Wave Phenomena ResearchMicrofluidic and Bio-sensing Technologies

Study on the properties of conductive adhesives in various curing manners for MCM applications

Hong Gao、Guojun Hu、Jinwen Zhou 等 5 位作者2014-06-16Journal of Adhesion Science and Technology

In this work, the properties of solvent and solvent-free electrically conductive adhesives (ECAs) in four curing manners and after solder reflows are investigated for multi-chip module applications. The curing behaviors and thermal degradation of solvent and solvent-free ECAs are also studied by differential scanning…

Electronic Packaging and Soldering Technologies3D IC and TSV technologiesSynthesis and properties of polymers

Growth of Sr2FeMoO6 Based Tri-layer Structure for Room Temperature Magnetoresistive Applications

N. Naveen Kumar、Pankaj Misra、R.K. Kotnala 等 5 位作者2014-06-16Integrated ferroelectrics

Tunnel magnetoresistance in Sr2FeMoO6 based tri-layered structure was studied at room temperature. The Sr2FeMoO6/SrTiO3/Sr2FeMoO6 tri-layered structure was grown by pulse laser deposition on STO buffered Si(100) substrate. The X-ray diffraction and Micro Raman studies confirm the polycrystalline phase formation of SFM…

Magnetic and transport properties of perovskites and related materialsMultiferroics and related materialsAdvanced Condensed Matter Physics

Effects of ion source voltages on the composition, hardness, and temperature-dependent tribological properties of Ti–Al–Si–N nanocomposite coatings

Liang Feng、Hongjun Wang、Changwei Zou2014-06-16Japanese Journal of Applied Physics

Ti–Al–Si–N nanocomposite coatings were deposited on Si(111) and cemented carbide substrates by ion source enhanced magnetron sputtering. The diffraction intensities of (111) decreased while whose of (200) increased when the ion source voltage was increased from 400 to 800 V. The friction coefficient of Ti–Al–Si–N nano…

Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchIon-surface interactions and analysis

UNRAVELING THE MYSTERY OF NATURAL RUBBER BIOSYNTHESIS. PART II: COMPOSITION AND GROWTH OF IN VITRO NATURAL RUBBER USING HIGH-RESOLUTION SIZE EXCLUSION CHROMATOGRAPHY

Cheng Ching K. Chiang、Balaka Barkakaty、Judit E. Puskás 等 7 位作者2014-06-16Rubber Chemistry and Technology

ABSTRACT The superior properties of natural rubber (cis-1,4-polyisoprene [NR]) are a function of its structure and composition, properties that still remain a mystery and that are irreplaceable by any synthetic rubber. NR from guayule (Parthenium argentatum) has been gaining special interest for its hypoallergenic pro…

biodegradable polymer synthesis and propertiesPlant biochemistry and biosynthesisPlant-Derived Bioactive Compounds

Integral equation theory for atactic polystyrene nanocomposite melts with a multi-site model

Qinzhi Xu、Lan Chen2014-06-16The Journal of Chemical Physics

In this work, a multi-site chain model was incorporated into the polymer reference interaction site model to investigate the structure and properties of atactic polystyrene (aPS) melt and the structural correlations of dilute spherical nanoparticles dissolved in aPS melt. The theoretically calculated X-ray scattering…

Polymer crystallization and propertiesMaterial Dynamics and PropertiesPolymer Nanocomposites and Properties

Shaking Table Tests of a Structure Equipped with Superelastic Dampers

Miguel Branco、Lúıs Guerreiro、Alfredo Campos Costa 等 4 位作者2014-06-16Journal of Earthquake Engineering

The energy dissipation capacity of the NiTi alloy was evaluated as part of a series of shake table tests. A superelastic damper was developed to take advantage of the hysteretic energy dissipation associated with this type of shape memory alloy. Each device was tested at different intensity levels. A vertical steel ca…

Seismic Performance and AnalysisStructural Health Monitoring TechniquesShape Memory Alloy Transformations

Development of Thrust Bearings With High Specific Load

Yuki Sumi、Takeshi Sano、Tanehiro Shinohara 等 7 位作者2014-06-16OpenAlex

Steam turbine is now facing strict market demands for further improvements in efficiency. To meet such demands, thrust bearing with high specific load makes a huge contribution to improvements in efficiency. Because the smaller thrust dummy diameter of rotor can be adopted and leakage flow through the thrust dummy can…

Material Properties and ApplicationsMechanical Failure Analysis and SimulationEngineering Diagnostics and Reliability

Investigation of asparagine deamidation in a SOD1-based biosynthetic human insulin precursor by MALDI-TOF mass spectrometry.

Anna Bierczyńska-Krzysik、Małgorzata Łopaciuk、Renata Pawlak-Morka 等 4 位作者2014-06-16Acta Biochimica Polonica

A biosynthetic human insulin precursor displayed enhanced susceptibility to deamidation at one particular site. The present study was undertaken to monitor progress of precursor deamidation at successive manufacturing stages. MALDI-TOF/TOF MS in combination with controlled endoproteinase Glu-C and endoproteinase Asp-N…

Advanced Proteomics Techniques and ApplicationsProtein purification and stabilityEnzyme Structure and Function