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Advances in process overlay: ATHENA alignment system performance on critical process layers

David Laidler、Henry Megens、S. Lalbahadoersing 等 5 位作者2002-07-01Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

The continuing reduction of IC device dimensions puts stringent demands on the corresponding overlay performance. As part of the total overlay budget, the effects of the different process parameters need to be characterized and well understood. In a joint development program between IMEC and ASML, the robustness of di…

Electronic Packaging and Soldering TechnologiesAdvanced Surface Polishing TechniquesCopper Interconnects and Reliability

Vibrational Spectroscopic Study of Iodine-Doped Poly(Isothianaphthene)

Wei-Te Chen、Graham A. Bowmaker、John M. Seakins 等 4 位作者2002-07-01Applied Spectroscopy

Far-infrared, mid-infrared, and Raman spectroscopy were used to characterize iodine-doped poly(isothianaphthene) (PITN) films and powders. The far-infrared and mid-infrared results show changes from absorption mode to reflective mode as the doping level increases, consistent with the iodine-doped PITN becoming more me…

Organic Electronics and PhotovoltaicsConducting polymers and applicationsAnalytical Chemistry and Sensors

Studies of UV Induced Phototransferred Thermoluminescence in CaSO4:Dy Pellets

François Grossi、L.L. Campos2002-07-01Radiation Protection Dosimetry

The ultraviolet (UV) radiation response of the CaSO4:Dy pellets produced at IPEN/SP was studied using phototransferred thermoluminescence (PTTL). The PTTL characteristics of three different types of CaSO4:Dy pellets were investigated. The main parameters studied were: thermal treatments, post UV exposure storage time,…

Luminescence Properties of Advanced MaterialsGlass properties and applicationsRadiation Detection and Scintillator Technologies

Synthesis and characterization of di-n-hexylamino-substituted phthalocyanines

Gülay Gümüş、Vefa Ahsen2002-07-01Journal of Porphyrins and Phthalocyanines

Metal-free- and metallophthalocyanines ( M = Ni , Zn and Co ) carrying four di-n-hexylamino and four chloro groups in peripheral positions have been synthesized from the corresponding dichlorophthalonitrile derivative in the presence of the anhydrous metal salts [ NiCl 2 , Zn ( O 2 CMe ) 2 , CoCl 2 ] or a strong organ…

Porphyrin and Phthalocyanine ChemistryPhotodynamic Therapy Research StudiesMetal-Catalyzed Oxygenation Mechanisms

Study of Structural Phase Transitions in [Mg(H2O)6][SiF6] by Means of Single Crystal 2H NMR

Takahiro Iijima、Motohiro Mizuno、M. Suhara 等 4 位作者2002-07-01Zeitschrift für Naturforschung A

The temperature and angular dependences of 2 H NMR spectra were measured for single crystal of [Mg(H 2 O) 6 ][SiF 6 ]. At 283 K, (e 2 Qq/h,η) of 2 H, averaged by fast 180° flip of water molecules, were obtained as (128 kHz, 0.72), (123 kHz, 0.82) and (106 kHz, 0.80), corresponding to three unequal water molecules in […

High-pressure geophysics and materialsGlass properties and applicationsChemical and Physical Properties of Materials

Discoloration Resistant Polyolefin Films

Roswell E. King2002-07-01Journal of Plastic Film & Sheeting

The preservation of physical properties and aesthetics are two important aspects of the film industry. As such, forethought and care need to be taken in terms of the type of polymer and stabilization systems that are used to derive robust and attractive film products. For most applications, a combination of a phenolic…

Polymer Science and PVC

Confined growth of Eu2O3 nanocrystals in a new polymorph in amorphous mesoporous Al2O3

Paritosh Mohanty、S. Ram2002-07-01Philosophical Magazine B

Eu2O3 in divided groups in pores in a mesoporous Al2O3 (amorphous) has a confined growth in nanocrystals (average, 30 nm diameter) in a new polymorph of R3c hexagonal crystal structure with lattice parameters a = 0.5468 nm and c = 1.6950 nm. This occurs on reacting dispersed Eu3+ cations (in water) with a mesoporous A…

Catalytic Processes in Materials ScienceMesoporous Materials and CatalysisAdvanced Condensed Matter Physics

Pyrolysis and limiting oxygen indices of cotton fabrics graft copolymerized with oligomeric vinyl phosphonate and/or N‐methylolacrylamide

Fumi Masuko、Chizu Mitani、Munenori Sakamoto2002-07-01Fire and Materials

Abstract Graft copolymerization of an oligomeric vinyl phosphonate (FYR) and/or N ‐methylolacrylamide was made onto cotton fabrics by a pad‐dry‐steam method. The limiting oxygen indices (LOI) of the treated samples confirmed the P–N synergism. Simultaneous TG/DTA measurements indicated that an exothermic peak appeared…

Microplastics and Plastic PollutionFlame retardant materials and propertiesPolymer Science and PVC

Study of Utilization of Ground EVA Waste as Filler in NBR Vulcanizates

Viviane X. Moreira、Bluma G. Soares2002-07-01Polymers and Polymer Composites

Rubber blends containing nitrile rubber (NBR) and ground ethylene-vinyl acetate copolymer waste (EVAW) from the footwear industry have been prepared over a wide range of composition (up to 90 phr of waste component). The ground EVAW had particle size in the range of 100-350 mm and a gel content of 60±5%. The effect of…

Polymer crystallization and propertiesPolymer Nanocomposites and Propertiesbiodegradable polymer synthesis and properties

The Use of Phosphogypsum as a Filler for Thermoplastics, Part I: The Use of Phosphogypsum as a Filler for Polyolefine Compositions

E. Kowalska、Zbigniew Wielgosz2002-07-01Journal of Reinforced Plastics and Composites

Works has been done on the application of specially treated and thermally modified phosphogypsum [1-4] (by-product gypsum from phosphoric acid industry) by a method developed in Poland as filler for low-density polyethylene and polypropylene compositions. Filling of polyolefins with phosphogypsum is intended to enhanc…

Graphite, nuclear technology, radiation studies

High Resolution Emission Spectra of TL Materials

T. Vilaithong、Somsak Wanwilairat、M.W. Rhodes 等 5 位作者2002-07-01Radiation Protection Dosimetry

High resolution emission spectra of several TL materials, that are commonly used in dosimetry, were measured using a low cost fibre optic spectrometer containing a 2048 pixel CCD array. The spectra were taken from 177 to 890 nm with a wavelength resolution of 1.3 nm. This allowed for line width discrimination and the…

Luminescence Properties of Advanced MaterialsRadiation Dose and ImagingDigital Radiography and Breast Imaging

Integrated Electro-Optic Switches Based on Ferroelectric Liquid Crystal Waveguides

Luigi Sirleto、David S. Hermann、Giusy Scalia 等 9 位作者2002-07-01Fiber & Integrated Optics

Two integrated electro-optic switches based on smectic C * ferroelectric liquid crystal (FLC) planar waveguides oriented in the bookshelf geometry have been designed and realized. In order to test the first switch, a particular waveguide structure consisting of a three-stage device, having a thin FLC film middle stage…

Photonic and Optical DevicesLiquid Crystal Research AdvancementsMolecular spectroscopy and chirality

The Effect of Non-Spherical Collapse on Determination of Explosion Bubble Parameters

John P. Best2002-07-01Defense Technical Information Center (DTIC)

The technique developed by Arons (1948) for determining the parameters that characterise the adiabatic model of underwater explosion bubble contents is revised to account for the effect of non-spherical collapse. Additional modifications are made to enhance accuracy. The parameters predicted are similar to those given…

Energetic Materials and CombustionCombustion and Detonation ProcessesUltrasound and Cavitation Phenomena

Synthesis of bulk In2O3–Sc2O3 and their transparent conducting oxide films

S. B. Qadri、Heungsoo Kim2002-07-01Journal of Applied Physics

Bulk In2O3–Sc2O3 alloys were synthesized in a cubic phase (space group Ia3) with Sc2O3 content varying between 0 and 30 wt %. The lattice parameters of these alloys showed a linear dependence on the composition. Films were deposited on glass substrates at a temperature of 250 °C in an oxygen pressure of 10 mTorr using…

ZnO doping and propertiesGas Sensing Nanomaterials and SensorsElectronic and Structural Properties of Oxides

Gd2AlGe2: An “Almost-Zintl Phase” and a New Stacking Variant of the W2CoB2 TypeDedicated to Professor Welf Bronger on the Occasion of his 70th Birthday

Wonyoung Choe、Sean William McWhorter、Gordon J. Miller2002-07-01Zeitschrift für anorganische und allgemeine Chemie

The synthesis, structure determination and calculated electronic structure of the new phase, Gd2AlGe2, are reported. The compound crystallizes in a new structure type with space group C2/c, a = 10.126(2) Å, b = 5.6837(12) Å, c = 7.7683(16) Å, and β = 104.729(3)s. Tight-binding linear-muffin-tin orbital (TB-LMTO-ASA) c…

Rare-earth and actinide compoundsIron-based superconductors researchSemiconductor materials and interfaces

CD reference materials for sub-10th μm applications

Michael W. Cresswell、E. H. Bogardus、Joaquin V Martinez de Pinillos 等 9 位作者2002-07-01Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Prototype linewidth reference materials with Critical Dimensions (CDs) as narrow as 70 nm have been patterned in silicon-on-insulator films. The sidewalls of the reference features are parallel, normal to the substrate surface, and have almost atomically smooth surfaces. Linewidth calibration begins with the measureme…

Advancements in Photolithography TechniquesElectron and X-Ray Spectroscopy TechniquesSurface and Thin Film Phenomena

Correlation between processability and properties of a high density polyethylene by a rheological approach

Paolo Mariani、G. Carianni、Francesco Menconi 等 4 位作者2002-07-01Macromolecular Chemistry and Physics

The thermal-oxidative and thermal-mechanical stability of high density polyethylene (chromium based catalyst technology) was examined at many different temperatures using a rheological approach. The changes in molecular structure, which take place during processing, have been studied using a Clextral co-rotating twin-…

Polymer crystallization and propertiesPolymer Nanocomposites and PropertiesPolymer Foaming and Composites

On the phase diagram of a ‘collapsing’ hard-sphere system

С. М. Стишов2002-07-01Philosophical Magazine B

The principal phase diagram of a system with a repulsive step potential is built using the properties of a hard-sphere system as a starting point. The behaviour of the melting curve is discussed and the possibility of a phase transition in the liquid phase is indicated.

Phase Equilibria and ThermodynamicsMaterial Dynamics and PropertiesPickering emulsions and particle stabilization

Thermoluminescent Characteristics of LiKYF5:Pr3+ and KYF4:Tm3+ Crystals for Applications in Neutron and Gamma Dosimetry

M. Coeck、F. Vanhavere、Н. М. Хайдуков2002-07-01Radiation Protection Dosimetry

Thermoluminescent (TL) properties of two concentration series lithium potassium yttrium fluoride doped with praseodymium (LiKYF5:Pr3+) and potassium yttrium fluoride doped with thulium (KYF4:Tm3+) have been investigated after gamma and neutron irradiation. The main purpose of this research is to see whether these mate…

Luminescence Properties of Advanced MaterialsRadiation Detection and Scintillator TechnologiesInorganic Fluorides and Related Compounds