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Numerical analysis of DUV scatterometry on EUV masks

M. Wurm、Bernd Bodermann、Regine Model 等 4 位作者2007-06-18Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

We investigated the potential, applicability, and advantages of DUV scatterometry including DUV ellipsometry for the dimensional characterisation of the absorber structures on EUV photomasks. By means of numerical investigations on the basis of rigorous diffraction calculations we demonstrate the sensitivity of DUV sc…

Advancements in Photolithography TechniquesOptical Coatings and GratingsElectron and X-Ray Spectroscopy Techniques

Electronic structure of zinc‐blende MnTe within the GW approximation

A. Fleszar、M. Potthoff、W. Hanke2007-06-18Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics

Abstract Using the local spin‐density approximation (LSDA) and the (non self‐consistent) GWapproach, the (quasiparticle) band structure is calculated forMnTe in zinc‐blende geometry. Different parameters characterizing the electronic structure are computed for an antiferromagnetic and the ferromagnetic phase and compa…

ZnO doping and properties2D Materials and ApplicationsHeusler alloys: electronic and magnetic properties

Texture formation of GeSbTe thin films prepared by multilayer deposition of modulating constituent elements

Sang Yub Ie、Byung Tack Bea、Young-kun Ahn 等 10 位作者2007-06-18Applied Physics Letters

The preferred oriented texture Ge2Sb2Te5 (GST) thin film was prepared on SiO2∕Si(001) and TiN(60nm)∕Si(001) substrates. With the modulated layers of each constituent materials, the stoichiometry of thin film was controlled. Through cross section transmission electron microscope analysis and the x-ray diffraction (XRD)…

Chalcogenide Semiconductor Thin FilmsPhase-change materials and chalcogenidesNonlinear Optical Materials Studies

A rigorous solution for electromagnetic scattering from any kind of asperities of multilayer 1-D structures in the X-ray-VUV ranges

Leonid I. Goray2007-06-18Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

The rigorous integral equation method (viz MIM) in which the border structure is represented by a multilayer 1-D grating working at small wavelength-to-period ratios is used for taking into account electromagnetic scattering from different-types of nano-irregularities, such as periodical, random, self-organized, and t…

Electromagnetic Scattering and AnalysisOptical Coatings and GratingsSurface Roughness and Optical Measurements

Use of bias sputtering to enhance decoupling in oxide composite perpendicular recording media

Hwansoo Lee、James A. Bain、David E. Laughlin2007-06-18Applied Physics Letters

The effects of substrate bias on two types of oxide composite perpendicular recording media CoCrPt–SiO2 and FePt–MgO were investigated. The use of substrate bias greatly modified the thin film microstructure and resulted in the enhanced grain decoupling in the films. The growth characteristics due to preferential resp…

Metal and Thin Film MechanicsSemiconductor materials and devicesCopper Interconnects and Reliability

Surface plasmon resonance as a tool for the estimation of adsorbed polymeric layer characteristics: Theoretical considerations and experiment

Alexandros Koutsioubas、Nikolaos Spiliopoulos、D. L. Anastassopoulos 等 5 位作者2007-06-18Journal of Polymer Science Part B Polymer Physics

Abstract The potential application of Surface Plasmon Resonance (SPR) spectroscopy in evaluating the thickness and volume fraction of adsorbed macromolecular layers is discussed in this work. The sensitivity of SPR spectroscopy to different layer concentration and to the layer extension normal to the surface (thicknes…

Gold and Silver Nanoparticles Synthesis and ApplicationsPolymer Surface Interaction StudiesNanofabrication and Lithography Techniques

Cascade Reactions of Me3Si‐Substituted Imidazolidine‐1,3‐Diols with PbO2, Including Oxidation of the Corresponding Diol and Subsequent Elimination of the Trimethylsilyl Fragment

E.V. Tretyakov、Г.В. Романенко、В.Н. Икорский 等 10 位作者2007-06-18European Journal of Organic Chemistry

Abstract It was found that reactions of 2‐Me 3 Si‐R‐substituted (Si–C sp or Si–C ) imidazolidine‐1,3‐diols with PbO 2 in MeOH are cascade reactions, which involve the oxidation of imidazolidine‐1,3‐diols into nitronyl nitroxide (NN–R–SiMe 3 ) and further elimination of the Me 3 Si group to give NN–R–H. The efficiency…

Magnetism in coordination complexesSynthesis and Biological EvaluationChemical Reactions and Mechanisms

Effects of polyethylene oxide on the dynamics of the α and α′ relaxations observed in polystyrene by low-frequency anelastic spectroscopy

Xuebang Wu、Zhen‐Gang Zhu2007-06-18Applied Physics Letters

The relaxation dynamics in amorphous polystyrene and blends with polyethylene oxide (PEO) has been investigated by low-frequency anelastic spectroscopy. The dissipation spectra exhibit two relaxation peaks, corresponding to the α relaxation and the α′ (liquid-liquid) transition, respectively. The origin of the liquid-…

Polymer crystallization and propertiesMaterial Dynamics and PropertiesPolymer Nanocomposites and Properties

Differential signal scatterometry overlay metrology: an accuracy investigation

Daniel Kandel、Mike Adel、Berta Dinu 等 10 位作者2007-06-18Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

The overlay control budget for the 32nm technology node will be 5.7nm according to the ITRS. The overlay metrology budget is typically 1/10 of the overlay control budget resulting in overlay metrology total measurement uncertainty (TMU) requirements of 0.57nm for the most challenging use cases of the 32nm node. The cu…

Advanced Surface Polishing TechniquesAdvanced Measurement and Metrology TechniquesOptical Coatings and Gratings

Gas permeability and selectivity of benzophenone aromatic isophthalic copolyamides

Cristian Carrera‐Figueiras、Manuel Aguilar‐Vega2007-06-18Journal of Polymer Science Part B Polymer Physics

Abstract The synthesis, thermal, and gas transport properties of poly(benzophenone isophthalamide), DBF/ISO, poly(benzophenone‐5‐ tert ‐butylisophthalamide), DBF/TERT, homopolymers, and their copolyamides with different DBF/TERT ratios are reported. The results indicate that the glass transition temperatures of the co…

Polymer crystallization and propertiesMembrane Separation and Gas TransportSynthesis and properties of polymers

Broadband dielectric study of oligomer of poly(vinyl acetate): A detailed comparison of dynamics with its polymer analog

Madhusudan Tyagi、Ángel Alegría、Juan Colmenero2007-06-18Physical Review E

We have studied the dynamics of a trimer of vinyl acetate (3VAc) using broadband dielectric spectroscopy over a wide temperature range to cover its primary and secondary relaxations. The dielectric spectra for the primary process over the entire temperature range have been described in terms of the Kohlraush-Williams-…

Material Dynamics and PropertiesPolymer Nanocomposites and PropertiesThermodynamic properties of mixtures

Oxygen vacancy formation for transient structures on the CeO2(110) surface at 300 and 750 K

Björn Herschend、Micael Baudin、Kersti Hermansson2007-06-18The Journal of Chemical Physics

Ab initio embedded-cluster calculations have been performed for the CeO2(110) surface using temperature induced structures from molecular dynamics (MD) snapshots. As a first step towards understanding how temperature induced distortions of the surface structure influence the surface oxygen reactivity, the energy cost…

Catalytic Processes in Materials ScienceRadioactive element chemistry and processingCatalysis and Oxidation Reactions

Inelastic mean-free paths and surface excitation parameters by absolute reflection electron-energy loss measurements

T. Nagatomi、Kenta Goto2007-06-18Physical Review B

An analytical approach is proposed for simultaneously determining the inelastic mean-free path (IMFP), the surface excitation parameter (SEP), and the differential SEP (DSEP) in absolute units from an absolute reflection electron energy loss spectroscopy (REELS) spectrum under the assumption that the normalized differ…

Semiconductor materials and devicesElectron and X-Ray Spectroscopy TechniquesSurface and Thin Film Phenomena

THE ROLE OF PHOSPHONATE DERIVATIVES ON THE CORROSION INHIBITION OF STEEL IN HCL MEDIA

Mohammed Benabdellah、A. Dafali、B. Hammouti 等 8 位作者2007-06-18Chemical Engineering Communications

The inhibition of corrosion of steel by two P-containing compounds, sodium methyldodecyl phosphonate and sodium methyl (11-smethacryloyloxyundecyl) phosphonate, in hydrochloric acid has been investigated at various temperatures using electrochemical techniques (impedance spectroscopy (EIS), potentiodynamic polarizatio…

Corrosion Behavior and InhibitionHydrogen embrittlement and corrosion behaviors in metalsConcrete Corrosion and Durability

CHEMICAL AND BIOCHEMICAL PROCESSES FOR NOxCONTROL FROM COMBUSTION OFF-GASES

Somnath Basu2007-06-18Chemical Engineering Communications

Nitrogen oxides (NOx) are major air pollutants as they have adverse effects on health and the environment. Various types of combustion equipment, including biosolids incinerators, are the sources of NOx emissions in the atmosphere. Various source control measures in the form of the use of low NOx burners and burner st…

Atmospheric chemistry and aerosolsCatalytic Processes in Materials ScienceIndustrial Gas Emission Control

Strain and friction induced by van der Waals interaction in individual single walled carbon nanotubes

Hyungbin Son、Ge. G. Samsonidze、Jing Kong 等 8 位作者2007-06-18Applied Physics Letters

Axial strain is introduced into individual single wall carbon nanotubes (SWCNTs) suspended from a trench-containing Si∕SiO2 substrate by employing the van der Waals interaction between the SWCNT and the substrate. Resonance Raman spectroscopy is used to characterize the strain, and up to 3% axial strain is observed. I…

Carbon Nanotubes in CompositesGraphene research and applicationsForce Microscopy Techniques and Applications

Liquid crystal pretilt angle control using adjustable wetting properties of alignment layers

Han Jin Ahn、Jong Bok Kim、Kyung Chan Kim 等 8 位作者2007-06-18Applied Physics Letters

The authors demonstrate the production of amorphous fluorinated carbon (a-C:F) thin film with adjustable wetting properties, inducing variable liquid crystal (LC) pretilt angles. To control the surface wetting properties, they apply a dual radio frequency magnetron system with a controlled power ratio of targets. In t…

Surface Modification and SuperhydrophobicityMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research

Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography

B. D. F. Casse、H. O. Moser、Joongyeop Lee 等 6 位作者2007-06-18Applied Physics Letters

Presently existing THz electromagnetic metamaterials were mostly produced as planar single layer structures, either deposited on a substrate or embedded in a polymer matrix, and patterned by a primary pattern generator such as an electron beam writer or a laser writer. Some attempts to produce more voluminous structur…

Metamaterials and Metasurfaces ApplicationsTerahertz technology and applicationsAdvanced Antenna and Metasurface Technologies

SEM study of the morphologic change of high‐density polyethylene surface grafted with glycidyl methacrylate

Zhirong Li、Huiliang Wang2007-06-18Journal of Applied Polymer Science

Abstract Scanning electron microscopy (SEM) study of the morphologic change of high‐density polyethylene (HDPE) surface grafted with glycidyl methacrylate (GMA) was reported. Radiation‐induced grafting of GMA onto HDPE was carried out in acetone and dichloromethane solution, respectively. The effects of irradiation do…

Polymer crystallization and propertiesMicroplastics and Plastic PollutionPolymer Nanocomposite Synthesis and Irradiation

Surface degradation of magnetic properties in manganite thin films proved with magneto-optical techniques in reflection geometry

S. València、A. Gaupp、W. Gudat 等 6 位作者2007-06-18Applied Physics Letters

Magneto-optical techniques in reflection geometry turn out to be a very efficient tool to study the surface magnetism due to their sensitivity to magnetic and chemical variations across the sample depth. The existence of a surface layer of about one to five unit cells with strongly depressed magnetic properties, when…

Magnetic and transport properties of perovskites and related materialsAdvanced Condensed Matter PhysicsElectronic and Structural Properties of Oxides