Materials Literature
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As device design rule has been made pattern size shrink, overlay control has become one of the most critical issues for semiconductor manufacturing. Advanced lithographic exposure tools, such as EUV and i-ArF scanners, require high-order overlay corrections. In conventional overlay metrology, several overlay targets a…
The solubilities in water of four main ginger bioactives, 6-gingerol, 6-shogaol, 8-gingerol and 10-gingerol, were predicted using a conductor-like screening model for real solvent (COSMO-RS) calculations. This study was conducted since no experimental data are available for ginger bioactive solubilities in hot water.…
We investigated the release characteristics of single-wall carbon nanotubes (CNTs) synthesized by a pilot-scale plant. In addition to on-site aerosol measurements at the pilot-scale plant where the CNTs were synthesized, harvested, and packed, we conducted dustiness tests by vortex shaking and by transferring CNTs fro…
A simple and direct method for preparation of thermo- and pH- responsive materials based on starch is presented. Introduction of 2-hydroxy-3-butoxypropyl as hydrophobic group into starch developed thermo-responsive material, and further introduction of hydrophilic carboxymethyl group could produce dual thermo- and pH-…
The effect of Lu surface concentration on oxygen permeation in polycrystalline α‐alumina wafers was determined at 1773 K under limited oxygen potential gradients (Δ ), where the two surfaces of the wafer were deliberately subjected to different oxygen partial pressures [ (I) ≪ (II)]. When oxygen permeation occurred ma…
Horizontal polarization of the plasma during electron cyclotron resonance heating (ECRH) is capable of suppressing the reversed-shear Alfvén eigenmodes. The suppression mechanism consists in the formation of a potential 'hill' for the cascade modes when the ECRH power is deposited slightly inside of the q min -surface…
Photo resist shrinkage during CD-SEM measurements has been a well known phenomenon. It presents great difficulties and challenges in CD-SEM metrology, for example, in the CD-SEM tool matching. The “check board” method currently popular in CD-SEM tool matching avoids measuring the same location twice and resorts to the…
A phonon modes and elastic properties of two different rare-earth based bulk metallic glasses Sc 36 Al 24 Co 20 Y 20 and Gd 36 Al 24 Co 20 Y 20 are computed using Hubbard-Beeby approach and our well established model potential. The local field correlation functions due to Hartree (H), Taylor (T), Ichimaru and Utsumi (…
We have extracted an extensive collection of recurrent structural motifs (RSMs), which consist of sequentially non-contiguous structural motifs (4-6 residues), each of which appears with very similar conformation in three or more mutually unrelated protein structures. We find that the proteins in our set are covered t…
Starting from the rigorous excitation equation, the propagation of waves through a 2D waveguide with the periodically corrugated finite-length insert is examined in detail. The corrugation profile is chosen to obey the property that its amplitude is small as compared to the waveguide width, whereas the sharpness of th…
Three heterometallic coordination polymers based on 4-amino-1,2,4-triazole (atrz), Cd2.98Fe2.02(atrz)6(SCN)10·2H2O (1), Cd2.86Co2.14(atrz)6(SCN)10·2H2O (2), and Cd2.02Ni2.98(atrz)6(SCN)10·2H2O (3), were synthesized. Crystal structures of the polymers were determined by single-crystal X-ray diffraction, X-ray powder di…
Using a series of uranyl acetate stained or platinum-palladium shadowed organic samples, an empirical analytical method to extract surface information from energy-filtered transmission electron microscopy (EFTEM) images is described. The distribution of uranium or platinum-palladium atoms, which replicate the sample s…
The new measuring method that we developed executes a contour shape analysis that is based on the pattern edge information from a SEM image. This analysis helps to create a highly precise quantification of every circuit pattern shape by comparing the contour extracted from the SEM image using a CD measurement algorith…
Engineered nanomaterials (ENMs) quantification in complex media is an area under development, much demanded by stakeholders due to the introduction of a myriad of consumer products containing ENMs. In this work, Particle-Induced X-ray Emission (PIXE) will be shown as capable of quantifying ENMs in complex media for bo…
In Polymer Electrolyte Membrane Fuel Cell (PEMFC), bipolar plate is considered one of the most important components. Bipolar plate has a multi-functional in the fuel cell stack. The materials used in producing bipolar plate are greatly affecting its final properties. Through this study, the properties of bipolar plate…
Sayong ball clay membrane can be fabricated as a cheap membrane material and available commonly at Malaysia. This work was concerned with the study of Sayong ball clay membrane as a water filtration by gel casting technique. Gel casting involves mixing process of Sayong ball clay with the solvent, monomer, dispersant,…
The effect of Fe to P concentration ratio on structures, crystallization behavior, and magnetic properties in (Fe0.79+xP0.1−xC0.04B0.04Si0.03)99Cu1 alloys was investigated. The increase of Fe to P concentration ratio changes the structure and crystallization process of as-quenched ribbon. Nanocrystalline alloys with e…
We report in this work the synthesis and spectroscopic, electrochemical, spectroelectrochemical, and photophysical characterization of a novel series of ruthenium polypyridyl complexes with 4-methyl-2,2'-bipyridine-4'-carbonitrile (Mebpy-CN) as an auxiliary ligand of general formula [Ru(bpy)3-x(Mebpy-CN)x](PF6)2 (x =…
Aims: Soil black carbon (BC) has been shown to possess large amounts of cation exchange sites and surface charge, and is viewed as a potential soil amendment to improve nutrient retention and for pollutant remediation. This study investigated the nanoscale distribution of reactive functional groups and the binding of…
One of the main challenges related to the growing number of Litho layers and most specifically to Multi Patterning, is the ability to align to many layers at once. In the past things were simple, the alignment tree was set so that every layer aligns to one layer and at the most is measured versus two layers, such as c…