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Oxidation of Silicon Utilizing a Microwave Plasma System: Electric-Stress Hardening of SiO2 Films by Controlling the Surface and Interface Roughness

Yoshiro Kabe、Ryu Hasunuma、Kikuo Yamabe2012-03-23Japanese Journal of Applied Physics

Electric-stress hardening of silicon dioxide (SiO2) films under high electric field stresses was studied. SiO2 films were formed by two-step oxidation utilizing thermal oxidation and plasma oxidation. This process has the advantages of both oxidation processes: the low degradation rate of thermal oxidation and the fla…

Semiconductor materials and devicesSilicon Nanostructures and PhotoluminescenceCopper Interconnects and Reliability

Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas

Lizhu Tong2012-03-23Open Physics

Abstract The effect of gas flow in low pressure inductively coupled Ar/N2 plasmas operating at the rf frequency of 13.56 MHz and the total gas pressure of 20 mTorr is studied at the gas flows of 5–700 sccm by coupling the plasma simulation with the calculation of flow dynamics. The gas temperature is 300 K and input p…

Diamond and Carbon-based Materials ResearchPlasma Applications and DiagnosticsPlasma Diagnostics and Applications

Modified shape memory cyanate polymers with a wide range of high glass transition temperatures

Fang Xie、Longnan Huang、Yanju Liu 等 4 位作者2012-03-23Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Shape memory cyanate polymers (SMCPs) are a new kind of smart materials, which have huge development potential and a promising future. A series of shape memory cyanate polymers were prepared by cyanate ester and varying content of a linear modifier. The thermal properties of the SMCPs were investigated by Differential…

Conducting polymers and applicationsPolymer composites and self-healingPolyoxometalates: Synthesis and Applications

Fourteen-Electron Ring Model and the Anomalous Magnetic Circular Dichroism of meso-Triarylsubporphyrins

Steven Vancoillie、Marc Hendrickx、Minh Tho Nguyen 等 7 位作者2012-03-23The Journal of Physical Chemistry A

The MCD spectra of meso-triarylsubporphyrins show a sign anomaly which is correlated with the acceptor properties of the aryl substituent. From the spectra, magnetic moments of the excited states are determined. In the context of a simplified orbital model, the sign change is attributed to the quenching of the magneti…

Porphyrin and Phthalocyanine ChemistryPhotochemistry and Electron Transfer StudiesMolecular spectroscopy and chirality

Poly(acrylic acid)-silicon Hybrids Prepared via a RAFT-mediated Process and Covalent Immobilization of Glucose Oxidase

Jiayou Ji、Lanyan Li、Keqiang Xia 等 5 位作者2012-03-23Journal of Macromolecular Science Part A

A surface modification technique was proposed for the modification of silicon surface with glucose oxidase (GOD). The silicon surface was first graft copolymerized with acrylic acid (AAc) via surface-initiated reversible addition-fragmentation chain-transfer (RAFT)-mediated process. With the aid of a water-soluble car…

Advanced biosensing and bioanalysis techniquesConducting polymers and applicationsPolymer Surface Interaction Studies

Preparation and characterization of the solid‐state Ag/AgCl reference electrode for RC structures

Guofu Qiao、Huigang Xiao、Hong-Liang Yi 等 4 位作者2012-03-23Sensor Review

Purpose Corrosion sensors and networks are the most effective techniques to obtain the corrosion information and recognize the corrosion status of reinforced concrete structures. However, reference electrode is the key element to provide the baseline for potential control of the corrosion monitoring sensors during cor…

Corrosion Behavior and InhibitionConcrete Corrosion and DurabilitySmart Materials for Construction

Pitting Corrosion Monitoring Using Acoustic Emission

Asa Prateepasen2012-03-23InTech eBooks

Damage from corrosion represents one of the most important problems in existing structures. Various types of traditional nondestructive testing (NDT) for example, Ultrasonic ThicknessMeasurement (UTM) or Magnetic Flux Leakage (MFL) are implemented to measure the growth of corrosion; each method, however, has its parti…

Hydrogen embrittlement and corrosion behaviors in metalsErosion and Abrasive MachiningNon-Destructive Testing Techniques

Green Synthesis and Characterizations of Silver and Gold Nanoparticles

Nora Elizondo-Villarreal、Paulina Segovia、Vctor Coello 等 10 位作者2012-03-23InTech eBooks

In the last years, biosynthesis of nps have been received considerable attention due to the growing need to develop clean, nontoxic chemicals, environmentally benign solvents and renewable materials [Gericke and Pinches, 2006; Harris and Bali, 2008]. As a result, researchers in the field of nanoparticle synthesis and…

Nanoparticles: synthesis and applicationsNanotechnology research and applications

Effect of Molecular Architecture on the Polyelectrolyte Structuring under Confinement

Çağrı Üzüm、Ričardas Makuška、Regine von Klitzing2012-03-23Macromolecules

The paper addresses the structuring and rheology of semidilute polyelectrolyte solutions with varied concentration and degree of polymer branching. The used polymer is constituted of the units of sodium 2-acrylamido-2-methylpropanesulfonate (NaPAMPS) with the branching inserts of 2-(2-bromopropionyloxy)ethyl acrylate…

Material Dynamics and PropertiesRheology and Fluid Dynamics StudiesElectrostatics and Colloid Interactions

Bis(methacrylato-κO)bis(2,4,6-trimethylpyridine-κN)copper(II)

Ejaz、Islam Ullah Khan、Alina Murtaza 等 4 位作者2012-03-23Acta Crystallographica Section E Structure Reports Online

In the monomeric title complex, [Cu(C(4)H(5)O(2))(2)(C(8)H(11)N)(2)], the Cu(II) atom lies on a centre of inversion. Its coordination by two substituted pyridine ligands and two carboxyl-ate anions leads to a slightly distorted trans-CuN(2)O(2) square-planar geometry. The dihedral angle between the mean planes of the…

Metal complexes synthesis and propertiesCrystal structures of chemical compoundsMagnetism in coordination complexes

Charging behaviour of MNOS structures with embedded Ge nanocrystals

Zsolt J. Horváth、Károly Zs. Molnár、György Molnár 等 8 位作者2012-03-23Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics

Abstract Charging behaviour of MNOS structures containing Ge nanocrytals embedded at the SiO2/Si3N4 interface are studied by experiments and by calculating tunnelling probabilities of electrons and holes to the conductance or valence band of the nitride layer, respectively, for structures with and without nanocrystals…

Semiconductor materials and devicesSilicon Nanostructures and PhotoluminescenceElectronic and Structural Properties of Oxides

Coat-develop track process for inorganic EUV resist

Masahiko Harumoto、Tadashi Miyagi、Koji Kaneyama 等 7 位作者2012-03-23Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

A baseline coat-develop track process has been established for inorganic EUV resists. Inorganic EUV resists have already been highlighted for their higher resolution and lower Line-Width-Roughness (LWR) for lithography features as well as strong etch resistance [1], [2], [3], [4]. This inorganic resist system is not o…

Advancements in Photolithography TechniquesElectron and X-Ray Spectroscopy TechniquesIntegrated Circuits and Semiconductor Failure Analysis

Properties of Cartilage Engineered from Elderly Human Chondrocytes for Articular Surface Repair

Xing Zhao、David A. Bichara、Frederick P. Ballyns 等 8 位作者2012-03-23Tissue Engineering Part A

Numerous studies on engineering cartilage utilizing chondrocytes from juvenile animal sources have been reported. However, there are many unknown aspects of engineering cartilage using human chondrocytes-especially from middle-aged or elderly adults-which are critical for clinical application of tissue engineering in…

Osteoarthritis Treatment and MechanismsKnee injuries and reconstruction techniquesSilk-based biomaterials and applications

Preparation, characterization, and evaluation of a heparin‐benzalkonium chloride‐graphite oxide/polymethylvinyl siloxane nanocomposite

Ninglin Zhou、Dong Xu、Jun Zhang 等 6 位作者2012-03-23Journal of Biomedical Materials Research Part A

A heparin (Hep)-benzalkonium chloride (C12)-graphite oxide (GO)/polymethylvinyl siloxane (PMVS) nancomposite was prepared via melting intercalation at different temperatures. Scanning electron microscopy images showed the Hep-C12-GO was well dispersed into PMVS processed at 100°C. Mechanical properties measurement dem…

Electrospun Nanofibers in Biomedical ApplicationsPolymer Nanocomposite Synthesis and IrradiationAntimicrobial agents and applications

Line width roughness control for EUV patterning

Karen Petrillo、George Huang、Dominic Ashworth 等 10 位作者2012-03-23Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Controlling line width roughness (LWR) is a critical issue in extreme ultraviolet lithography (EUVL). High sensitivity, high resolution, and low LWR are required for EUV lithography resist. However, simultaneously achieving optimal properties through chemical tuning alone is difficult. The track process is one of the…

Advancements in Photolithography TechniquesElectron and X-Ray Spectroscopy TechniquesIntegrated Circuits and Semiconductor Failure Analysis

Performance Assessment on Continuous Air Monitors Under Real Operating Conditions

Céline Monsanglant-Louvet、N. Liatimi、F. Gensdarmes2012-03-23IEEE Transactions on Nuclear Science

In the nuclear industry, workers may be exposed to artificial radioactive aerosols. These aerosols are generally composed of particles with a diameter between 0.1$\mu{\hbox {m}}$and 10$\mu{\hbox {m}}$. To protect workers in nuclear facilities, monitors continuously measure radioactivity in the air. The main function o…

Risk and Safety AnalysisScientific Measurement and Uncertainty EvaluationGraphite, nuclear technology, radiation studies

Synthesis of core‐shell fluoroacrylate copolymer latex via emulsion polymerization and its application in ink‐jet ink

Xuefeng Li、Jingfang Zhang、Xingping Zhou 等 7 位作者2012-03-23Journal of Applied Polymer Science

Abstract Core‐shell fluoroacrylate copolymer latex was synthesized via semicontinuous seed emulsion polymerization, in which ethyl acrylate was utilized to prepare core, and methyl methacrylate, butyl acrylate, methacrylate acid, and hexafluorobutyl methacrylate were employed to constitute the shell. So the yielded la…

Surface Modification and SuperhydrophobicityAdvanced Polymer Synthesis and CharacterizationPolymer Nanocomposites and Properties

Macrocyclic [M2L(μ‐L′)]+ Complexes (M = NiII, ZnII; L′ = Cl– or RCO2–) Incorporating Thiophenolate and Phenylsulfonate Donor Units: Preparation, Reactivity, Structure, and Stability

S. Kass、Berthold Kersting2012-03-23European Journal of Inorganic Chemistry

Abstract The effect of de‐tert‐butylation on the coordinating properties of the 24‐membered hexaazadithiophenolate macrocycle 13,27‐bis(tert‐butyl)‐3,6,9,17,20,23‐hexaazatricyclo[23.3.1.11.15]triaconta‐1(28),11,13,15(30),25,26‐hexaene‐29,30‐dithiol (H2L1) has been examined. For this purpose, a series of mixed‐ligand N…

Metal-Organic Frameworks: Synthesis and ApplicationsMetal complexes synthesis and propertiesMagnetism in coordination complexes

Smoothing of substrate pits using ion beam deposition for EUV lithography

Jenah Harris-Jones、Vibhu Jindal、Patrick A. Kearney 等 6 位作者2012-03-23Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Mitigation of pit-type defects proves to be a major hurdle facing the production of a defect-free mask blank for EUV lithography. Recent efforts have been directed toward substrate smoothing methods during deposition. The angle of incidence of the substrate is known to have a significant effect on the growth of defect…

Advancements in Photolithography TechniquesElectron and X-Ray Spectroscopy TechniquesIon-surface interactions and analysis