Materials Literature
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We discuss the rapid growth of films and lithographically templated microstructures of vertically aligned small-diameter multiwalled carbon nanotubes (VA-MWNTs), by atmospheric-pressure thermal chemical vapor deposition (CVD) of C2H4/H2/Ar on a Fe/Al2O3 catalyst film deposited by electron beam evaporation. The structu…
We have designed and fabricated a new hybrid nanoparticle that combines the intense local fields of nanorods with the highly tunable plasmon resonances of nanoshells. This dielectric core-metallic shell prolate spheroid nanoparticle bears a remarkable resemblance to a grain of rice, inspiring the name "nanorice". This…
Early indicators for nanoparticle-derived adverse health effects should provide a relative measure for cytotoxicity of nanomaterials in comparison to existing toxicological data. We have therefore evaluated a human mesothelioma and a rodent fibroblast cell line for in vitro cytotoxicity tests using seven industrially…
We report here preliminary studies of biocidal effects and cellular internalization of ZnO nanoparticles on Escherichia coli bacteria. ZnO nanoparticles were synthesized in di(ethylene glycol) (DEG) medium by forced hydrolysis of ionic Zn2+ salts. Particle size and shape were controlled by addition of small molecules…
A wafer pattern inspection system using scanning electron microscopy (SEM) is desirable because electron probing makes it possible to inspect not only surface defects, but also internal electric properties. However, the detection rate of SEM is typically about 100 mega pixels per second (Mpps) due to the effect of sho…
Scatterometry is a fast, non-destructive critical dimension (CD) optical metrology technique based on the analysis of light scattered from a periodic array of features. With technological advances in manufacturing, semiconductor devices are made in ever shrinking geometries. In recent years, the ability of scatteromet…
Magnetism in Cu 1-x Cd x Fe 2 O 4 ferrites (x=0.0, 0.1, 0.2, 0.3, 0.4, 0.5) was measured using an ac susceptibility technique and the vibrating sample magnetometer. The orientation of spins at octahedral and tetrahedral sites and Y–K angles have been measured. For samples having x = 0.0, 0.1 and 0.2, the Y–K angle is…
A preliminary result of the morphology and yield of chemically synthesized polypyrrole (PPY) using β–naphthalene sulfonic acid (NSA) and ammonium peroxodisulphate (APS) in aqueous medium is presented. Various micro/nanotubes were obtained using different dopant/monomer (D/M) ratios and temperature settings. Similar bu…
We perform event-driven molecular dynamics simulations of a system composed by uniaxial hard ellipsoids for different values of the aspect ratio and packing fraction. We compare the molecular orientational-dependent structure factors previously calculated within the Percus-Yevick approximation with the numerical resul…
Self-assembling diblock copolymer thin films are an intriguing possible photolithography alternative for high-resolution patterning of advanced integrated circuit device elements. Cylindrical- and lamellar-phase materials spontaneously form patterns suggestive of contact-hole arrays and transistor gates at critical di…
In two-step solidification of alloys that form a metastable phase, the first stage of microstructural evolution following solidification of the primary (metastable) phase involves growth of the stable phase into the mushy-zone. The growth rate of the stable phase can be predicted using a simple dendrite growth model i…
In the paper we give an update about the development status of gas discharge produced plasma (GDPP) EUV sources at XTREME technologies. Already in 2003 first commercial prototypes of xenon GDPP sources of the type XTS 13-35 based on the Z-pinch with 35 W power in 2π sr have been delivered and integrated into micr…
The electronic structure of a series of double layer (Sr(3)V(2)O(7), KLaNb(2)O(7), Li(2)SrNb(2)O(7), RbLaNb(2)O(7), Rb(2)LaNb(2)O(7)) as well as triple layer (Ca(4)Ti(3)O(10), K(2)La(2)Ti(3)O(10), Sr(4)V(3)O(9.7), CsCa(2)Nb(3)O(10)) Dion-Jacobson and Ruddlesden-Popper phases and quadruple layer A(n)()B(n)(O(3)(n)(+2)…
Downscaling of semiconductor fabrication technology requires continuous improvements in production process control. To ensure tool-to-tool matching and compatibility of critical dimension-scanning electron microscopy (CD-SEM) measurements to measurements from other technologies, such as optical CD, or from other fabri…
pH is one of the key parameters that affect the stability and function of proteins. We have studied the effect of pH on the pyridoxal-5'-phosphate-dependent enzyme phosphoserine aminotransferase produced by the facultative alkaliphile Bacillus circulans ssp. alkalophilus using thermodynamic and crystallographic analys…
We report on our comprehensive survey of high-index UV optical materials that may enable extension of immersion lithography beyond a numerical aperture of 1.45. Band edge, refractive index, and intrinsic birefringence (IBR) at 193 nm determine basic viability. Our measurements of these properties have reduced the list…
The chemical composition of the surface of an amphiphilic diblock copolymer film, comprised of polystyrene and poly(4-(2-(2-(2-acetoxy)ethoxy)ethoxy)styrene), has been characterized upon equilibration in water and in a vacuum, employing surface sensitive near-edge X-ray absorption fine structure spectroscopy. The oute…
Abstract A new approach for microporous polymeric material is developed utilizing the secondary interactions such as hydrogen bonding in the polymer chains in polyurethane systems at ambient conditions. A new series of highly rigid, thermally stable, and readily soluble cycloaliphatic polyurethanes were designed and s…
A planar optical waveguide configuration is proposed to monitor the buildup of thick polyelectrolyte multilayers on the surface of the waveguide in aqueous solutions. Instead of detecting the layer by the electromagnetic evanescent field the polyelectrolyte layer acts as an additional waveguiding film that is sensed b…
Oxythiophosphate compounds, which contain anions comprised of oxidized phosphorus bound to oxygen and sulfur, are scarce and, in general, poorly characterized. Although alpha-Na3PO3S has been known for over 60 years, little has been revealed about this compound. Here we present thermal analysis and second-harmonic-gen…